Microscopical investigation of rough and smooth surfaces Fast measurements, within seconds Fast change over of objectives Lateral resolution approx.1 µm Vertical resolution < 1 nm Measurement results independent of color and material Rugged construction for use in production Technical Data Measurement head (standard values) All data are subjective to be changed without notice. All instruments are manufactured according to the customer’s requirements if possible. Light sources LEDs Measuring/focusing range with internal motor, approx. [mm] 15 Measuring/focusing range with piezo actuator, approx. [µm] 200 Resolution vertical, approx. [nm] < 0.1 Image size, approx. (different cameras are used depending on the application) [Pixel] 1400 x 1000 Dynamic range, max. approx. [bit] 14 Turret 3x – 6x, depending on customer’s request. Motorised turret on request. Motorised head displacement on request. Translation stages Displacement (x,y,z), depends on customer’s application [mm] 50 – 300 or more Step width (µm), approx. [µm] 1 Flatness/100 mm, approx. [µm] 1 Objectives (available types) Magnification NA Stand-off Measurement area approx. Resolution lateral approx. [mm] [mm] [µm2] [µm2] x 2.5 <0.01 10.3 5000 x 4500 < 10 x 5 0.13 9.3 2500 x 2200 < 5 x 10 0.3 7 1250 x 1100 < 2 x 20 0.4 5 640 x 550 < 1 x 50 0.55 3.4 250 x 250 < 1 x 100 0.7 2 100 x 100 < 0.5 Software Measurement and evaluation software for standard and scientific applications. Customised modules available on request. Envelope and phase evaluation are standard. Stitching feature is standard. Unique double exposure feature is standard. Autofocus is standard. Groove sample 10µm – 1mm Textured steel sheet Concave director plate Micromechanical tuning fork Applikations Data sheet: stainless_steel.pdf Applikationsberichte Untersuchung von Edelstahl mit unterschiedlicher Oberflächenbehandlung Tags: WeißlichtinterferometerWLI
