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WLI

WLI Lab - investigation of rough and smooth surfaces

Weißlichtinterferometer
  • Microscopical investigation of rough and smooth surfaces
  • Fast measurements, within seconds
  • Fast change over of objectives
  • Lateral resolution approx.1 µm
  • Vertical resolution < 1 nm
  • Measurement results independent of color and material
  • Rugged construction for use in production